From: El¿bieta Nossarzewska-Or³owska
[nossar_e@sp.itme.edu.pl]
Sent: Tuesday, 11 December, 2001
13:02
To: Michael Moll
Subject: new R&D
Dear Michael
We are interested in a new
R&D collaboration:
The Institute of
Electronic Materials Technology, Wolczynska 133 str., 01-919 Warszawa,
POLAND
Contact person:
dr Elzbieta Nossarzewska-Orlowska
Group members
name
current
activities
fraction of time
1. Dr Zygmunt Luczynski
director of the Institute
2. Dr Elzbieta
Nossarzewska-Orlowska silicon
wafers technology and
characterisation, Si
epitaxy
20%
3. Dr Roman
Kozlowski
C-DLTS,
PITS
20%
4. Andrzej
Brzozowski
spreading resistance,
C-V
10%
5. Piotr
Zabierowski
silicon crystals pulling
technology
20%
6. Bronislaw
Piatkowski silicon
wafers
thinning
10%
7. Dr Andrzej
Hruban
A3B5 semiconductors
technology
10%
8. Dr Wlodzimierz
Strupinski
A3B5 MO CVD epitaxy (GaN layers)
10%
9. Andrzej
Kowalik
e-beam
masks
10%
10. Dr Lech
Dobrzanski
A3B5 detectors
technology
10%
11. Barbara
Surma
FTIR
measurements
15%
12 Prof. Adam
Barcz
SIMS
laboratory
15%
Field of interest within this
collaboration:
Silicon and A3B5
compounds for detectors – technology and characterisation.
-Silicon wafers fabrication (double side
polishing, thinning; TD generation & anihilation)
-Silicon wafers characterisation (resistivity;
geometrical parameters)
-Silicon epitaxial layers for thin
detectors
-A3B5 detectors
-Masks fabrication
-Deep levels measurements
-FTIR & SIMS measurements
Available
resources:
-FZ silicon puller (3”) available for
research
-CZ Si pullers (up to 6 “); Magnetic CZ
puller- installation in 2002;
-Production line for silicon wafers ( up to 6
“) fabrication;
-Thermal donors annealing
furnace;
-Silicon epitaxy production line (up to
6”)
-Silicon wafers and epitaxial layers
measurements equipment
-Silicon oxidation furnace (quartz tube up to
6 “)
-LEC pullers for GaAs, InP and other A3B5
compounds;
-MO CVD epitaxial reactors for GaN and A3B5
multilayers structure
-Fabrication line for detectors on A3B5
-Electron-beam master masks and reticles
system
-FTIR spectrometers ( RT, LN and
10K)
-SIMS Cameca unit (deep profiling
included)
-C-DLTS and Photo-Induced Transient
Spectroscopy( high resistivity semiconductors) set-up.
Best regards
Elisabeth